Taiwan Semiconductor Manufacturing Co. evacuated factories following a 6.4 magnitude earthquake near the city of Chiayi that injured at least four people and suspended work at factories across the island’s south.

Chipmaker TSMC said on Tuesday that all its sites were operating following an overnight 6.4 magnitude earthquake in southern Taiwan that was centred on a mountainous rural area and caused only minor damage and light injuries.

In a statement to DCD, TSMC said that as a result of the earthquake, its fabs in Taiwan’s Southern Science Park recorded a maximum seismic intensity of level 5, while fabs in Central Science Park recorded a maximum intensity of level 4 and Hsinchu Science Park fabs (including Longtan and Zhunan) recorded a maximum intensity of level 3.